Current position: Home >> Scientific Research >> Paper Publications

Mode transition in CF41 Ar inductively coupled plasma

Release Time:2025-02-23  Hits:

Date of Publication: 2022-10-07

Journal: PHYSICS OF PLASMAS

Institution: 物理学院

Volume: 20

Issue: 12

Page Number: 123513-123513

Prev One:Mode transition in CF4 + Ar inductively coupled plasma

Next One:Non-monotonic behavior of electron temperature in argon inductively coupled plasma and its analysis via novel electron mean energy equation