location: Current position: Home >> Scientific Research >> Paper Publications

Experimental and numerical investigations of the phase-shift effect in capacitively coupled discharges

Hits:

Date of Publication:2022-10-02

Journal:PHYSICS OF PLASMAS

Affiliation of Author(s):物理学院

Volume:21

Issue:8

ISSN No.:1070-664X

Pre One:Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas

Next One:Experimental and Numerical Studies of Pulse-Modulated ICP Discharges