Current position: Home >> Scientific Research >> Paper Publications

Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias

Release Time:2025-02-23  Hits:

Date of Publication: 2022-10-02

Journal: Chinese Physics B

Volume: 23

Issue: 11

ISSN: 1674-1056

Prev One:Effects of matching network on the hysteresis during E and H mode transitions in argon inductively coupled plasma

Next One:Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas
Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep