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Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma

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Date of Publication:2022-10-02

Journal:JOURNAL OF APPLIED PHYSICS

Affiliation of Author(s):物理学院

Volume:118

Issue:3

ISSN No.:0021-8979

Pre One:Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model

Next One:Effects of matching network on the hysteresis during E and H mode transitions in argon inductively coupled plasma
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