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射频感应耦合等离子体对材料表面上原子再复合行为的影响

Release Time:2019-03-21  Hits:

Leading Scientist: Fei Gao

Project Participants: 张钰如,YongXin Liu

Project Source: 国家自然科学基金项目

Sub-Class of Project: 青年科学基金项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 11205025

Date of Project Approval: 2012-09-25

Scheduled Completion Time: 2015-12-31

Date of Project Initiation: 2013-01-01

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