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射频感应耦合等离子体对材料表面上原子再复合行为的影响

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Leading Scientist:Fei Gao

Project Participants:Zhang YuRu,YongXin Liu

Supported by:国家自然科学基金项目

Sub-Class of Project:青年科学基金项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:11205025

Date of Project Approval:2012-09-25

Scheduled completion time:2015-12-31

Date of Project Initiation:2013-01-01

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