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大功率低压射频感性耦合负氢离子源的物理基础研究

Release Time:2019-03-21  Hits:

Leading Scientist: 王友年

Project Participants: Chunsheng Ren,赵书霞,Fei Gao,张钰如

Project Source: 国家科技部

Status: 结题

Supported by: Ministry of Science and Technology

Nature of Project: 纵向

Project Approval Number: 2015GB114001

Date of Project Approval: 2014-12-31

Scheduled Completion Time: 2019-12-31

Date of Project Initiation: 2015-01-01

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