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面向刻蚀工艺的脉冲调制射频感应耦合等离子体源的特性研究

Release Time:2019-03-21  Hits:

Leading Scientist: Fei Gao

Project Participants: 张钰如,Wenqi Lu

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 11675039

Date of Project Approval: 2016-08-17

Scheduled Completion Time: 2020-12-31

Date of Project Initiation: 2017-01-01

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