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面向刻蚀工艺的脉冲调制射频感应耦合等离子体源的特性研究

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Leading Scientist:Fei Gao

Project Participants:Zhang YuRu,Wenqi Lu

Supported by:国家自然科学基金项目

Sub-Class of Project:面上项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:11675039

Date of Project Approval:2016-08-17

Scheduled completion time:2020-12-31

Date of Project Initiation:2017-01-01

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