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为等离子体均匀性控制改进

Release Time:2021-02-04  Hits:

Leading Scientist: 宋远红

Project Participants: 张权治,张钰如,YongXin Liu,Fei Gao,王友年

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Tokyo Rilike Kei Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2021-01-22

Scheduled Completion Time: 2021-12-31

Date of Project Initiation: 2021-01-01

Date of Project Completion: 2023-07-14

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