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等离子体增强化学气相沉积工艺过程的优化研究

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Leading Scientist:张钰如

Supported by:省、市、自治区科技项目

Sub-Class of Project:面上项目

Status:结题

Supported by:辽宁省科技厅

Nature of Project:纵向

Project Approval Number:2020-MS-114

Date of Project Approval:2020-04-27

Scheduled completion time:2022-04-30

Date of Project Initiation:2020-05-01

Date of Project Completion:2023-03-24

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