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等离子体增强化学气相沉积工艺过程的优化研究

Release Time:2020-12-24  Hits:

Leading Scientist: 张钰如

Institution: 物理学院

Project Source: 省、市、自治区科技项目

Project Level: Provincial and Ministerial Level

Sub-Class of Project: 面上项目

Status: 结题

Supported by: Liaoning Provincial Science and Technology Department

Nature of Project: 纵向

Project Approval Number: 2020-MS-114

Date of Project Approval: 2020-04-27

Scheduled Completion Time: 2022-04-30

Date of Project Initiation: 2020-05-01

Date of Project Completion: 2023-03-24

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