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射频等离子体技术调研咨询项目

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Leading Scientist:高飞

Project Participants:Kai Zhao,Zhang Quanzhi,Zhang YuRu,YongXin Liu,SONG Yuan-Hong,wangyounian

Supported by:企事业单位委托科技项目

Status:结题

Supported by:长江存储科技有限责任公司

Nature of Project:横向

Date of Project Approval:2021-03-12

Scheduled completion time:2021-07-31

Date of Project Initiation:2021-03-01

Date of Project Completion:2022-10-20

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