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PECVD非晶硅镀膜装备低气压射频等离子体数模研究

Release Time:2021-03-29  Hits:

Leading Scientist: 宋远红

Project Participants: 张莹莹,张钰如,王友年

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Suzhou Maxon Technology Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2021-03-17

Scheduled Completion Time: 2022-03-21

Date of Project Initiation: 2021-03-22

Date of Project Completion: 2023-07-14

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