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等离子体仿真开发技术及其相关应用研究合同

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Leading Scientist:张钰如

Project Participants:Kai Zhao,YongXin Liu,Zhang Quanzhi,Fei Gao,SONG Yuan-Hong,wangyounian

Supported by:企事业单位委托科技项目

Status:在研

Supported by:华为技术有限公司

Nature of Project:横向

Date of Project Approval:2021-04-30

Scheduled completion time:2021-12-31

Date of Project Initiation:2021-04-30

Pre One:面向高深宽比刻蚀工艺的超低频容性耦合等离子体源的特性研究

Next One:PECVD非晶硅镀膜装备低气压射频等离子体数模研究