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Numerical investigation of low pressure inductively coupled plasma sources: A review

Release Time:2023-05-05  Hits:

Date of Publication: 2022-10-07

Journal: ACTA PHYSICA SINICA

Institution: 物理学院

Volume: 70

Issue: 9

ISSN: 1000-3290

Key Words: "inductively coupled plasma; global model; fluid model; hybrid model; biased sheath model; particle-in-cell model"

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