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Numerical investigation of low pressure inductively coupled plasma sources: A review

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Date of Publication:2022-10-07

Journal:ACTA PHYSICA SINICA

Affiliation of Author(s):物理学院

Volume:70

Issue:9

ISSN No.:1000-3290

Key Words:"inductively coupled plasma; global model; fluid model; hybrid model; biased sheath model; particle-in-cell model"

Pre One:Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled plasmas with argon discharges

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