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Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled plasmas with argon discharges

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Date of Publication:2022-10-07

Journal:JOURNAL OF APPLIED PHYSICS

Volume:121

Issue:23

ISSN No.:0021-8979

Pre One:Role of gas composition in weakened nonlinear standing wave excitation and improved plasma radial uniformity in very-high-frequency asymmetric capacitive Ar/CF4 discharges

Next One:Numerical investigation of low pressure inductively coupled plasma sources: A review
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