location： Current position: Home >> Scientific Research >> Paper Publications

Role of gas composition in weakened nonlinear standing wave excitation and improved plasma radial uniformity in very-high-frequency asymmetric capacitive Ar/CF4 discharges

Hits:

Journal:JOURNAL OF PHYSICS D-APPLIED PHYSICS

Volume:57

Issue:30

ISSN No.:0022-3727

Key Words:ELECTRODE; LARGE-AREA; NONUNIFORMITIES

Pre One:Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges

Next One:Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled plasmas with argon discharges
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep