Role of gas composition in weakened nonlinear standing wave excitation and improved plasma radial uniformity in very-high-frequency asymmetric capacitive Ar/CF4 discharges
Release Time:2024-06-24 Hits:
Journal: JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume: 57
Issue: 30
ISSN: 0022-3727
Key Words: ELECTRODE; LARGE-AREA; NONUNIFORMITIES
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