Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges
Release Time:2024-06-24 Hits:
Indexed by: Journal Papers
Document Code: 390775
Date of Publication: 2024-04-01
Journal: PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume: 33
Issue: 4
ISSN: 0963-0252
Key Words: ANALYTIC MODEL; ARGON; DENSITY; ELECTRODES; ENERGY; LARGE-AREA; NONUNIFORMITIES; REACTORS