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Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges

Release Time:2024-06-24  Hits:

Journal: PLASMA SOURCES SCIENCE & TECHNOLOGY

Volume: 33

Issue: 4

ISSN: 0963-0252

Key Words: ANALYTIC MODEL; ARGON; DENSITY; ELECTRODES; ENERGY; LARGE-AREA; NONUNIFORMITIES; REACTORS

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