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Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges

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Journal:PLASMA SOURCES SCIENCE & TECHNOLOGY

Volume:33

Issue:4

ISSN No.:0963-0252

Key Words:ANALYTIC MODEL; ARGON; DENSITY; ELECTRODES; ENERGY; LARGE-AREA; NONUNIFORMITIES; REACTORS

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