带有射频偏压源的感性耦合Ar/O2/Cl2等离子体放电的混合模拟研究
Release Time:2024-06-24 Hits:
Indexed by: Journal Papers
Document Code: 390630
Date of Publication: 2024-02-29
Journal: 物理学报
Volume: 73
Issue: 4
Page Number: 209-223
ISSN: 1000-3290
Key Words: 偏压源; 感性耦合等离子体; 混合模型; 离子能量; 离子通量
CN: 11-1958/O4
Prev One:3D modeling of a double-driver ion source considering ion magnetization: an investigation of plasma symmetry modulation methods
Next One:Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges