Release Time:2024-06-24 Hits:
Indexed by: Journal Papers
Document Code: 390373
Date of Publication: 2024-05-01
Journal: NUCLEAR FUSION
Volume: 64
Issue: 5
ISSN: 0029-5515
Key Words: RF SOURCE; SYSTEM
Prev One:Modulation of the plasma radial uniformity in pulsed dual-antenna inductively coupled plasmas
Next One:Hybrid simulation of radio frequency biased inductively coupled Ar/O2/Cl2 plasmas