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Modulation of the plasma radial uniformity in pulsed dual-antenna inductively coupled plasmas

Release Time:2024-06-24  Hits:

Indexed by: Journal Papers

Document Code: 372101

Date of Publication: 2023-06-18

Journal: PHYSICS OF PLASMAS

Volume: 30

Issue: 6

ISSN: 1070-664X

Key Words: AZIMUTHAL SYMMETRY; FREQUENCY; ION FLUX UNIFORMITY; MODEL

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