Fast simulation of the E-H mode transition in Ar/O-2 inductively coupled plasmas
Release Time:2024-06-24 Hits:
Indexed by: Journal Papers
Document Code: 371541
Date of Publication: 2023-07-21
Journal: JOURNAL OF APPLIED PHYSICS
Volume: 134
Issue: 3
ISSN: 0021-8979
Key Words: AR; ARGON; ELECTRON-ENERGY DISTRIBUTION; HYSTERESIS; O-2; OXYGEN DISCHARGES