Investigation of the dual-frequency bias effect on inductively coupled Cl-2 plasmas by hybrid simulation
Release Time:2024-06-24 Hits:
Indexed by: Journal Papers
Document Code: 364594
Date of Publication: 2023-09-07
Journal: JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume: 56
Issue: 36
ISSN: 0022-3727
Key Words: DISCHARGES; ION ENERGY-DISTRIBUTIONS; MODEL; REACTORS; SHEATH; SILICON