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3D fluid model analysis on the generation of negative hydrogen ions for negative ion source of NBI

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Journal:Plasma Science and Technology

Volume:25

Issue:10

ISSN No.:1009-0630

Pre One:Benchmarking and validation of a hybrid model for electropositive and electronegative capacitively coupled plasmas

Next One:Investigation of the dual-frequency bias effect on inductively coupled Cl2 plasmas by hybrid simulation
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