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Benchmarking and validation of a hybrid model for electropositive and electronegative capacitively coupled plasmas

Release Time:2024-06-24  Hits:

Indexed by: Journal Papers

Document Code: 364169

Date of Publication: 2023-05-01

Journal: PLASMA SOURCES SCIENCE & TECHNOLOGY

Volume: 32

Issue: 5

ISSN: 0963-0252

Key Words: ARGON; ENERGY; FLUID MODEL; FREQUENCY; LARGE-AREA; RF DISCHARGE; SIMULATIONS

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