Investigation of stochastic heating and its influence on plasma radial uniformity in biased inductively coupled Ar discharges by hybrid simulation
Release Time:2024-06-24 Hits:
Indexed by: Journal Papers
Document Code: 363742
Date of Publication: 2023-04-18
Journal: PHYSICS OF PLASMAS
Volume: 30
Issue: 4
ISSN: 1070-664X
Key Words: ARGON; DENSITY; ENERGY-DISTRIBUTIONS; MODEL; REACTORS