A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas
Release Time:2024-10-10 Hits:
Indexed by: Journal Papers
Document Code: 363465
Date of Publication: 2023-07-01
Journal: PLASMA SCIENCE & TECHNOLOGY
Volume: 25
Issue: 7
ISSN: 1009-0630
Key Words: ARGON; GLOBAL-MODEL; SHEATH
CN: 34-1187/TL