location： Current position: Home >> Scientific Research >> Paper Publications

A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas

Hits:

Journal:Plasma Science and Technology

Volume:25

Issue:7

ISSN No.:1009-0630

Pre One:大面积矩形感性耦合等离子体源的三维流体力学模拟

Next One:Investigation of stochastic heating and its influence on plasma radial uniformity in biased inductively coupled Ar discharges by hybrid simulation
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep