location： Current position: Home >> Scientific Research >> Paper Publications

大面积矩形感性耦合等离子体源的三维流体力学模拟

Hits:

Date of Publication:2024-03-30

Journal:力学学报

Key Words:三维流体力学模拟; 光伏工艺; 大面积矩形感性耦合等离子体源; 平板显示工艺

Pre One:大面积矩形感性耦合等离子体源的三维流体力学模拟

Next One:A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep