Current position: Home >> Scientific Research >> Paper Publications

大面积矩形感性耦合等离子体源的三维流体力学模拟

Release Time:2024-10-10  Hits:

Date of Publication: 2024-03-30

Journal: 力学学报

Key Words: 三维流体力学模拟; 光伏工艺; 大面积矩形感性耦合等离子体源; 平板显示工艺

Prev One:大面积矩形感性耦合等离子体源的三维流体力学模拟

Next One:A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep