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大面积矩形感性耦合等离子体源的三维流体力学模拟

Release Time:2024-10-10  Hits:

Date of Publication: 2024-03-30

Journal: 力学学报

Volume: 55

Issue: 12

Page Number: 2891-2899

Key Words: 三维流体力学模拟; 光伏工艺; 大面积矩形感性耦合等离子体源; 平板显示工艺

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