location： Current position: Home >> Scientific Research >> Paper Publications

大面积矩形感性耦合等离子体源的三维流体力学模拟

Hits:

Date of Publication:2024-03-30

Journal:力学学报

Volume:55

Issue:12

Page Number:2891-2899

Key Words:三维流体力学模拟; 光伏工艺; 大面积矩形感性耦合等离子体源; 平板显示工艺

Pre One:带有射频偏压源的感性耦合Ar/O2/Cl2等离子体放电的混合模拟研究

Next One:大面积矩形感性耦合等离子体源的三维流体力学模拟
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep