Release Time:2024-10-10  Hits:

Indexed by: Journal Papers

Document Code: 388751

Date of Publication: 2023-01-01

Journal: 力学学报

Volume: 55

Issue: 12

Page Number: 2891-2899

ISSN: 0459-1879

Key Words: 三维流体力学模拟; 光伏工艺; 大面积矩形感性耦合等离子体源; 平板显示工艺

CN: 11-2062/O3