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带有射频偏压源的感性耦合Ar/O2/Cl2等离子体放电的混合模拟研究

Release Time:2024-10-10  Hits:

Date of Publication: 2024-03-30

Journal: 物理学报

Key Words: 偏压源; 感性耦合等离子体; 混合模型; 离子能量; 离子通量

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