Investigation of spatial distribution of EEPFs and neutral species in nitrogen inductively coupled plasmas by 2D hybrid simulation
Release Time:2024-10-10 Hits:
Indexed by: Journal Papers
Document Code: 384131
Date of Publication: 2023-09-18
Journal: PHYSICS OF PLASMAS
Volume: 30
Issue: 9
ISSN: 1070-664X
Key Words: ARGON; COLLISIONS; DENSITY; DISCHARGES; ELECTRON-ENERGY DISTRIBUTION; FLUID MODEL; GROWTH; N-2; PARTICLE-IN-CELL; UNIFORMITY