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Investigation of spatial distribution of EEPFs and neutral species in nitrogen inductively coupled plasmas by 2D hybrid simulation

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Date of Publication:2024-03-29

Journal:PHYSICS OF PLASMAS

Volume:30

Issue:9

ISSN No.:1070-664X

Key Words:ARGON; COLLISIONS; DENSITY; DISCHARGES; ELECTRON-ENERGY DISTRIBUTION; FLUID MODEL; GROWTH; N-2; PARTICLE-IN-CELL; UNIFORMITY

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