Modulations of the plasma uniformity by low frequency sources in a large-area dual frequency inductively coupled plasma based on fluid simulations
Release Time:2024-10-10 Hits:
Date of Publication: 2022-10-07
Journal: PHYSICS OF PLASMAS
Institution: 后勤处（后勤党委）
Volume: 22
Issue: 5
ISSN: 1070-664X