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Modulation of the plasma uniformity by coil and dielectric window structures in an inductively coupled plasma

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Date of Publication:2022-10-07

Journal:PLASMA SCIENCE & TECHNOLOGY

Affiliation of Author(s):后勤处(后勤党委)

Volume:23

Issue:9

ISSN No.:1009-0630

Key Words:"fluid simulation; gradient coil; vertical coil; stepped dielectric window; plasma uniformity"

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