Modulation of the plasma uniformity by coil and dielectric window structures in an inductively coupled plasma
Release Time:2024-10-10 Hits:
Date of Publication: 2022-10-07
Journal: PLASMA SCIENCE & TECHNOLOGY
Institution: 后勤处（后勤党委）
Volume: 23
Issue: 9
ISSN: 1009-0630
Key Words: "fluid simulation; gradient coil; vertical coil; stepped dielectric window; plasma uniformity"
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