Modeling and experimental investigation of the plasma uniformity in CF4/O-2 capacitively coupled plasmas, operating in single frequency and dual frequency regime
Release Time:2024-10-10 Hits:
Date of Publication: 2022-10-07
Journal: JOURNAL OF VACUUM SCIENCE TECHNOLOGY A
Institution: 物理学院
Volume: 33
Issue: 2
ISSN: 0734-2101