pV9fl5c7482Mb4aMbjRQ2kVawdq3aGELRa7h4TW0AGpYd9R688uznRdoduRN
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Modeling and experimental investigation of the plasma uniformity in CF4/O2

Release Time:2024-10-10  Hits:

Date of Publication: 2022-10-07

Journal: JOURNAL OF VACUUM SCIENCE TECHNOLOGY A

Institution: 物理学院

Volume: 33

Issue: 2

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