Release Time:2024-10-10 Hits:
Date of Publication: 2022-10-06
Journal: 第十八届全国等离子体科学技术会议
Institution: 物理学院
Page Number: 1
Note: 新增回溯数据
Prev One:相位差效应对氢等离子体瞬时行为和均匀性的影响研究
Next One:Modeling and experimental investigation of the plasma uniformity in CF4/O2