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Date of Publication:2022-10-06
Journal:第十八届全国等离子体科学技术会议
Affiliation of Author(s):物理学院
Page Number:1
Note:新增回溯数据
Pre One:相位差效应对氢等离子体瞬时行为和均匀性的影响研究
Next One:Modeling and experimental investigation of the plasma uniformity in CF4/O2