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论文类型:会议论文
发表时间:2014-01-01
页面范围:36-36
上一条:Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O-2/CF4 discharges
下一条:Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O2/CF4 discharges