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论文类型：会议论文

发表时间：2011-10-28

收录刊物：EI、CPCI-S、Scopus

页面范围：870-873

摘要：A novel double layer micro-bridge calorimeter structure is designed, in which an upper bridge suspends upon the lower one with its center membrane covering that of the lower one. This structure enables the self-align sputtering deposition of sample films with thickness of sub-micrometers easily without shadow mask. Finite element analyses simulation shows that this double layer calorimeter has the similar performance as the traditional micro-calorimeters, and the measurement error is less than 0.5 nJ/K and it can accurately measures the melting point of the sample film.