赵凯
个人信息Personal Information
副教授
博士生导师
硕士生导师
性别:男
毕业院校:大连理工大学
学位:博士
所在单位:物理学院
学科:等离子体物理
办公地点:三束实验室3号楼
电子邮箱:kaizhao@dlut.edu.cn
扫描关注
An experimental and computational investigation of discharge mode transitions in a partially magnetized radio frequency capacitively coupled oxygen discharge
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发表时间:2024-09-05
发表刊物:PLASMA PROCESSES AND POLYMERS
卷号:21
期号:8
ISSN号:1612-8850
关键字:AR; DRIVEN; ENERGY-DISTRIBUTION FUNCTION; OPTIMIZATION; OXIDATION; PLASMA-DENSITY
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