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个人信息Personal Information
副教授
博士生导师
硕士生导师
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：物理学院
学科：等离子体物理
办公地点：三束实验室4号楼
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- Yao, Jianxiong.Zheng, Bocong,Zhang, Zeduan,张权治,Schulze, Julian,Fu, Yangyang,赵凯,He, Feng,Miao, Jinsong,Ouyang, Jiting.Unified mechanism of sub-mode transitions and bistability induced by electron-sheath interactions in capacitively coupled plasmas[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2025,34(8)
- 周杨.赵凯,赵明亮,张莹莹,张钰如,刘永新,高飞,王友年.Parameter Dependences of Ion Energy Distribution and Ion Flux in Dual-Frequency Capacitively Coupled Argon Discharges[J],IEEE TRANSACTIONS ON PLASMA SCIENCE,2025
- 赵明亮.赵凯,张钰如,高飞,王友年.周杨.Nonlinear Dynamics of Capacitively Coupled Plasma Excited by Tailored Voltage Waveform[J],IEEE TRANSACTIONS ON PLASMA SCIENCE,2025
- 李欣阳.赵明亮,赵凯,张钰如,王友年.王瑛琪.Fluid simulation of the electromagnetic effects in large-area very-high-frequency capacitively coupled plasmas and a method to improve the plasma radial uniformity[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2025,58(32)
- 周杨.赵凯,刘永新,高飞,Schulze, Julian,王友年.马方方.Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources[J],Applied Physics Letters,2024,124(6)
- 周方杰.Wen, De-Qi,Liu, Jian-Kai,Su, Zi-Xuan,赵凯,张钰如,王友年.Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,33(4)
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- PECVD非晶硅镀膜装备低气压射频等离子体实验诊断研究项目,企事业单位委托科技项目,2021-03-17,2022-03-21,完成
- 面向刻蚀工艺的脉冲调制甚高频容性耦合等离子体的点燃物理,国家自然科学基金项目,2022-09-08,在研
- 等离子体离子引出电路阻抗匹配技术研究,企事业单位委托科技项目,一般性技术服务,2022-11-09,2023-07-14,结题
- 面向PECVD非晶硅镀膜装备的等离子体实验诊断平台搭建及关键技术研发项目,企事业单位委托科技项目,2022-11-01,在研
- 高频脉冲电源研究,事业单位委托科技项目,2023-12-06,在研
- 线路阻抗匹配器研究,事业单位委托科技项目,2023-12-06,在研
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