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个人信息Personal Information
副教授
博士生导师
硕士生导师
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：物理学院
学科：等离子体物理
办公地点：三束实验室3号楼
电子邮箱：kaizhao@dlut.edu.cn
Role of gas composition in weakened nonlinear standing wave excitation and improved plasma radial uniformity in very-high-frequency asymmetric capacitive Ar/CF4 discharges
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发表时间：2024-05-18
发表刊物：Journal of Physics D: Applied Physics
卷号：57
期号：30
ISSN号：0022-3727
关键字：Ar/CF4 capacitive discharge; Capacitive discharges; Elastic waves; Electric discharges; Electric excitation; Electric power transmission; Electromagnetic modeling; Harmonic analysis; Ions; Nonlinear electromagnetic model; Nonlinear standing wave effect; Nonlinear standing waves; Plasma uniformity; Standing wave effects; Very high frequency; Wave excitation
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