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个人信息Personal Information
副教授
博士生导师
硕士生导师
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：物理学院
学科：等离子体物理
办公地点：三束实验室4号楼
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Role of gas composition in weakened nonlinear standing wave excitation and improved plasma radial uniformity in very-high-frequency asymmetric capacitive Ar/CF4 discharges
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论文类型：期刊论文
论文编号：391842
发表时间：2024-08-02
发表刊物：JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷号：57
期号：30
ISSN号：0022-3727
关键字：ELECTRODE; LARGE-AREA; NONUNIFORMITIES
上一条：Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges
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