Crack-free AlGaN/GaN distributed Bragg reflectors synthesized by insertion of a thin SiNx interlayer grown on 6H-SiC substrate by metal-organic chemical vapor deposition
点击次数：
发表时间：2022-10-06
发表刊物：MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
所属单位：光电工程与仪器科学学院
卷号：27
页面范围：841-845
ISSN号：1369-8001