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EFFECT OF NITROGEN-DOPED CONCENTRATION ON THE TCR OF ITO THIN FILMS AT HIGH TEMPERATURE

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发表时间：2022-10-02

发表刊物：2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021)

页面范围：856-859

ISSN号：1084-6999

关键字："Nitrogen-doped; ITO; High temperature; TCR"

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