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论文类型：期刊论文

发表时间：2022-06-30

发表刊物：真空科学与技术学报

期号：2

页面范围：146-149

ISSN号：1672-7126

摘要：Various properties of microwave electron cyclotron resonance (ECR) plasma, including gas flow rate, plasma density and dependence of electron temperature on gas pressure, were measured with Langmuir probe to improve diamond-like carbon (DLC) film growth. We found that film growth conditions considerably affect microstructure and quality of DLC film. For example higher plasma density favors DLC film growth.

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