点击次数：

论文类型：期刊论文

发表时间：2022-06-30

发表刊物：功能材料

期号：3

页面范围：304-305,307

ISSN号：1001-9731

摘要：The configuration and working principle of microwave electron cyclotron resonance (ECR) plasma source enhanced unbalance magnetron sputtering equipment was introduced, and the preparation process of diamond-like carbon (DLC) by this equipment was described. Raman spectra confirm the DLC characteristics of the prepared film. The surface rms (root mean square) roughness of the film measured with atomic force microscope is approximately 1.9 nm, thus the film surface is very smooth. The CERT microtribometer system is employed to obtain information about the scratch resistance, frictional properties and sliding wear resistance of the film. Average friction coefficient is as low as 0.175. The wear condition of DLC film and Si substrate examined by scanning electron microscopy was compared, and the results show that the deposited DLC film has good wear resistance properties. The results of scratch resistance test indicate that the critical load is about 40 mN.

备注：新增回溯数据