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论文类型：期刊论文

发表时间：2016-05-01

发表刊物：2nd International Conference on Surfaces, Coatings and Nanostructured Materials - Asia (NANOSMAT-Asia)

收录刊物：SCIE、EI、CPCI-S、Scopus

卷号：22

期号：5

页面范围：1105-1113

ISSN号：0946-7076

摘要：The profile of the nano-mold can also influence the replication precision of the final 2D polymer nanochannels. In the present work, the aspect ratio of the nano-mold, the duty ratio of the nano-mold, and the thickness ratio were investigated by numerical simulation method. The replication precision of the 2D polymer nanochannels is evaluated by imprinting ratio. The simulation results show that the lower aspect ratio and duty ratio is associated with higher imprinting ratio. However, the imprinting ratio increases with the thickness ratio at beginning and then keeps nearly unchanged as the thickness ratio continuously increases. The proper thickness ratio is two. The imprinting temperature and pressure were also optimized according the imprinting ratio. The simulation results show that the optimal imprinting temperature and pressure were 120 A degrees C and 1.5 MPa, respectively.