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个人信息Personal Information
教授
博士生导师
硕士生导师
性别:男
毕业院校:威尔大学
学位:博士
所在单位:机械工程学院
学科:微机电工程
办公地点:机械工程学院2号楼214-2
联系方式:办公电话:0411-84709754
电子邮箱:zouhl@dlut.edu.cn
EXPERIMENTAL AND NUMERICAL STUDY ON PDMS COLLAPSE FOR FABRICATION OF MICRO/NANOCHANNELS
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论文类型:期刊论文
发表时间:2016-12-01
发表刊物:Journal of Electrical Engineering-Elektrotechnicky Casopis
收录刊物:SCIE、Scopus
卷号:67
期号:6
页面范围:414-420
ISSN号:1335-3632
关键字:PDMS collapse; micro/nanochannel; bonding; numerical simulation
摘要:PDMS (polydimethylsiloxane) collapse method is a simple and low cost approach for micronanochannel fabrication. However, the bonding pressure which influences the size of the final PDMS micro/nanochannels has not yet been studied. In this study, the effect of the bonding pressure on the size and maximum local stress of the PDMS micronanochannels was investigated by both experimental and numerical simulation method. The results show that when the bonding pressure is lower than 0.15 MPa the experiment results can agree well with the simulation results. The fluorescent images demonstrate that there is no blocking or leakage over the entire micro/nanochannels.