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论文类型：期刊论文

发表时间：2015-01-02

发表刊物：INTEGRATED FERROELECTRICS

收录刊物：SCIE、EI、Scopus

卷号：159

期号：1

页面范围：108-113

ISSN号：1058-4587

关键字：PZT thin films; crystalline orientation; texture evolution; pyrolytic films

摘要：This paper describes the effects of pyrolysis temperature and film thickness before annealing on the orientation and microstructure of the lead zirconate titanate (PZT) thin films prepared by chemical solution deposition method (CSD). Different thickness of the pyrolytic films were obtained by repeating deposition and pyrolysis with different times. The orientation and microstructures of the PZT thin films were characterized by X-ray diffractometry (XRD) and field-emission scanning electron microscope (SEM). The results show that the thickness of the pyrolytic films was the principal factor that affects the crystalline structures in PZT thin films.