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论文类型：期刊论文

发表时间：2014-11-01

发表刊物：BIOMICROFLUIDICS

收录刊物：SCIE、EI、PubMed、Scopus

卷号：8

期号：6

页面范围：066503

ISSN号：1932-1058

摘要：We present in this paper a method for obtaining a low cost and high replication precision 2D (two dimensional) nanofluidic chip with a PET (polyethylene terephthalate) sheet, which uses hot embossing and a thermal bonding technique. The hot embossing process parameters were optimized by both experiments and the finite element method to improve the replication precision of the 2D nanochannels. With the optimized process parameters, 174.67 +/- 4.51nm wide and 179.00 +/- 4.00 nm deep nanochannels were successfully replicated into the PET sheet with high replication precision of 98.4%. O-2 plasma treatment was carried out before the bonding process to decrease the dimension loss and improve the bonding strength of the 2D nanofluidic chip. The bonding parameters were optimized by bonding rate of the nanofluidic chip. The experiment results show that the bonding strength of the 2D PET nanofluidic chip is 0.664 MPa, and the total dimension loss of 2D nanochannels is 4.34 +/- 7.03nm and 18.33 +/- 9.52 nm, in width and depth, respectively. The fluorescence images demonstrate that there is no blocking or leakage over the entire micro-and nanochannels. With this fabrication technology, low cost polymer nanochannels can be fabricated, which allows for commercial manufacturing of nano-components. (C) 2014 AIP Publishing LLC.