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论文类型：期刊论文

发表时间：2014-01-01

发表刊物：JOURNAL OF MICROMECHANICS AND MICROENGINEERING

收录刊物：SCIE、EI、Scopus

卷号：24

期号：1

ISSN号：0960-1317

关键字：hot embossing; orthogonal experiment; finite element simulation; replication accuracy

摘要：Two-dimensional polyethylene terephthalate nanochannels with dimensions of around 80 nm width and 250 nm depth were imprinted precisely into a polyethylene terephthalate sheet with optimized hot embossing parameters. Deformation of the polyethylene terephthalate nanochannels was investigated by both experiments and simulation. The orthogonal method was employed for both simulations and experiments. The replication accuracy was evaluated by a method based on weighted average. Comparison of the replication accuracy between experimental data and simulation results shows good agreement and confirmed the developed simulation method. It is expected that the developed simulation method has high potential in the hot embossing process analysis for the viscoelastic case.