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Development of NiCr/NiSi thin-film thermocouple sensor for workpiece temperature measurement in chemical explosive material machining

Release Time:2019-03-11  Hits:

Indexed by: Journal Article

Date of Publication: 2006-02-01

Journal: JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME

Included Journals: EI、SCIE

Volume: 128

Issue: 1

Page Number: 175-179

ISSN: 1087-1357

Abstract: Temperature plays a vital role in the machining industry today. With increasing cutting speeds being used in. machining operations, the thermal aspects of cutting have become more important. A nickel-chrome versus nickel-silicon thin-film thermocouple system has been established for measuring instantaneous workpiece temperature in chemical explosive material machining. The thin-film thermocouples have been directly deposited inside high-speed steel cutters by means of multiple arc ion plating and the thickness of the thermocouple junction is only a few micrometers. The research effort has been concentrated on developing solutions to the insulating problem between the thin-film thermocouples and the high-speed steel cutters. SiO2 insulating films have been deposited on the high-speed steel substrates by microwave electron cyclotron resonance plasma source enhanced radiofrequency (rf) reactive magnetron sputtering. Static and dynamic calibrations of the NiCr/NiSi thin-film thermocouples are presented The results of the testing indicate that the thin-film thermocouples have good linearity, little response time, and perform excellently when machining in situ.

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