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医用TiNi合金表面等离子体沉积梯度DLC膜及抗腐蚀性能

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Indexed by:期刊论文

Date of Publication:2007-01-20

Journal:功能材料

Included Journals:EI、PKU、ISTIC、CSCD

Volume:38

Issue:1

Page Number:115-118

ISSN No.:1001-9731

Key Words:类金刚石膜;TiNi形状记忆合金;抗腐蚀性能

Abstract:采用双放电腔MW-ECR等离子体源增强磁控溅射和沉积技术,在TiNi合金表面成功地镀制了梯度DLC膜.拉曼光谱分析表明实验获得的薄膜是典型的DLC膜,其结构受梯度层工艺影响.采用原子力显微镜(AFM)观察了薄膜的表面形貌,结果显示其表面较为平整.在Troyde's模拟体液中的电化学腐蚀实验结果说明,梯度DLC膜显著地增强了TiNi合金基体的抗腐蚀能力.从示差扫描量热仪(DSC)结果看到表面改性没有明显影响TiNi合金基体的使用性能.

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